Custom Φ110mm Ceramic Reference Disc — ±2μm Thickness, 0.002 Flatness
The Challenge
Customer needed a large-diameter flat reference surface with extreme flatness requirements. Metal discs of this size warp and change shape with temperature. Ceramic was the answer.
What We Built
- Φ110mm × 8mm industrial ceramic disc
- Thickness tolerance: ±2μm
- Flatness: 0.002mm
Why Ceramic
At Φ110mm, metal warps under its own stress and shifts with temperature. Ceramic stays flat. Near-zero thermal expansion means the reference plane doesn’t drift. Wear-resistant for daily use.
Applications
- Optical measurement equipment reference plane
- Semiconductor wafer inspection platform
- Surface plate calibration reference
- Precision flatness verification
Your Design, Our Precision
Large format? Tight flatness? Tell us your specs.
Notes: The foregoing information has been desensitized for presentation. Should your company have commercial confidentiality requirements, our company may enter into a special confidentiality agreement with you.
